稀土元素掺杂对CoFe基非晶薄膜微波磁谱的影响

采用磁控溅射工艺制备了CoFeNbZrRE非晶态薄膜,重点研究了掺杂稀土元素(RE)的种类和掺杂量对薄膜微结构、软磁性能、微波磁导率及其频谱特性的影响。结果表明,少量稀土元素的掺杂对该类薄膜的微结构和软磁性能影响较小,但可增强薄膜磁谱的弛豫性,从而影响其微波磁导率。增加稀土元素的掺杂量能显著提高薄膜的弛豫性和微波磁损耗,且重稀土元素比轻稀土元素表现出更强的弛豫性。适当选取稀土元素的种类和含量,CoFeNbZrRE类非晶态薄膜在吉赫兹微波段复磁导率实部和虚部均可高于100,有望在超薄层吸波材料中获得应用。

Effect of Rare Earth Elements Adulteration on Microwave Magnetism of CoFe-based Amorphous Films

CoFeNbZrRE amorphous films were synthesized by RF magnetron sputtering.Influences of rare earth element content and variety on microstructure,soft magnetic capability and microwave complex permeability spectra were investigated particularly.Results showed that microstructure and soft magnetic parameters changed little with a little RE adulteration,but relaxation in the microwave magnetic spectra got stronger and the microwave permeability changed accordingly.Relaxation and magnetic loss in the microwave range were improved with more RE content.Especially,the role of heavy RE(such as Dy,Tb) was more remarkable.The real part and imaginary part of complex permeability in the GHz microwave range for CoFeNbZrRE films were all larger than 100 with moderate RE and adulteration quantity.Thus,it was possible for these films to be applied in the field of microwave absorption with super thin absorbing layers.