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Integrated silicon anemometer |
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| Authors: | van Putten AFP Middelhoek S |
| Affiliation: | Delft University of Technology, Electrical Materials Laboratory, Department of Electrical Engineering, Delft, Netherlands; |
| Abstract: | At present, planar silicon technology allows one to construct very sophisticated integrated circuits for the processing of electronic signals. In the letter, an integrated silicon sensor for the measurement of gas flow is introduced. |
| Keywords: | |