| 半导体四探针测试仪新型恒流源的开发 |
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| 引用本文： | 李晨山,孙以材,王伟.半导体四探针测试仪新型恒流源的开发[J].电子工业专用设备,2007,36(2):6-9. |
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| 作者姓名： | 李晨山 孙以材 王伟 |
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| 作者单位： | 河北工业大学微电子技术与材料研究所,天津,300130;河北工业大学微电子技术与材料研究所,天津,300130;河北工业大学微电子技术与材料研究所,天津,300130 |
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| 摘 要： | 首先根据四探针测试理论,阐述了恒流源电路在四探针测试仪中的重要性,给出了对恒流源的基本要求。然后介绍了我们在开发前期实验过的2种恒流源电路,它们分别是级联型镜象电流源电路和电压-电流转换电路。最后介绍了我们实际采用的直接利用反馈运放输出恒流的电路。对每种电路都给出了原理图、电流计算公式和性能分析。
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| 关 键 词： | 四探针 恒流源 电位器 集成运放 |
| 文章编号： | 1004-4507(2007)02-0006-04 |
| 修稿时间： | 01 5 2007 12:00AM |
The Development of the Constant Current Source for a Four-point Probe Instrument |
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| LI Chen-shan,SUN Yi-cai,WANG Wei.The Development of the Constant Current Source for a Four-point Probe Instrument[J].Equipment for Electronic Products Marufacturing,2007,36(2):6-9. |
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| Authors: | LI Chen-shan SUN Yi-cai WANG Wei |
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| Affiliation: | Institute of Microelectronic Technoiogy and Materials Hebei University of Technology Tianjin 300130 ,China |
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| Abstract: | At first, according to the theory of four-point probe, the importance of the constant current source circuit in a four-point probe instrument is demonstrated. The requirements of the constant current source are listed. Then two circuits having been tested by us during our former developing course are elaborated. They are the cascaded mirror-image current source, the voltage-current transforming circuit. Finally, the utilized circuit with a feedback amplifier to output constant current is demonstrated. The graphs of principle, the formulas to calculate the current and the analysis of their performance are all illustrated. At last, the experience of us is summarized. |
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| Keywords: | Four-point probe Constant current source Regulation-resistance Operational amplifier |
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