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Microdefects induced by cavitation for gettering in silicon wafer |
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| Authors: | Dan O Macodiyo Hitoshi Soyama Takashi Masakawa Kazuo Hayashi |
| Affiliation: | (1) Institute of Fluid Science, Tohoku University, 2-2-1 Katahira, Aoba-ku, Sendai 980-8577, Japan;(2) Department of Nanomechanics, Tohoku University, 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan |
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