不同压力腔的气体静压轴承静特性的数值模拟

气体静压轴承以其低摩擦、高精度成功应用于高精密回转运动台,其定位精度已达到纳米级水平,达到了物理极限,因此压力腔形状对气体静压轴承的影响无法忽略。通过CFD数值模拟,研究了不同压力腔形状对气体静压轴承静态性能的影响。针对矩形压力腔、圆形压力腔和锥形压力腔,研究分析了气膜内压力分布、气体质量流量和承载力等静态性能。结果表明:相同的条件下,锥形压力腔承载力较大,且压力腔内部气旋强度较弱,比较适合应用于高压重载的场合。

Numerical analysis of aerostatic static characteristic for bearings with the different recess

Aerostatic bearings are widely used in the high precise motion stage for their lower friction and high precision.As the extreme precise positioning accuracy of these equipments has reached nanometer level,and almost approaches the physical limit.So,the effect of the recess shape of aerostatic bearings cannot be neglected any longer.By CFD numerical method.the effect of the different recess shape of the bearings on the static characteristic is studied.The pressure distribution in gas film,as well as the mass flow rate and loading capacity are studied on the bearings with the rectangular recess,circular recess or tapered recess.The results show that the tapered recess of gas bearings have a more high loading capacity and lower vortex′s intensity in the recess at the same conditions.It properly applies in the situation of high pressure and load of gas bearings.