| TiO2/SiO2纳米多层膜光学特性研究 |
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| 引用本文： | 张杨,王维,圣桂金,田夏. TiO2/SiO2纳米多层膜光学特性研究[J]. 红外, 2007, 28(2): 12-14 |
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| 作者姓名： | 张杨 王维 圣桂金 田夏 |
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| 作者单位： | 沈阳工业大学理学院,辽宁,沈阳,110023;沈阳工业大学理学院,辽宁,沈阳,110023;沈阳工业大学理学院,辽宁,沈阳,110023;沈阳工业大学理学院,辽宁,沈阳,110023 |
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| 摘 要： | 采用磁控溅射方法在玻璃基底上制备了TiO2／SiO2纳米多层膜,用椭偏仪测试了薄膜的厚度和折射率。黑体实验研究表明,TiO2／SiO2纳米多层膜在800nm～1600nm区域内对红外线的吸收较好,且吸收率随着温度的升高而增大。红外光谱研究表明, TiO2／SiO2纳米多层膜在2300cm-1～2900cm-1区域内对红外线的吸收较好。
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| 关 键 词： | 磁控溅射 纳米多层膜 光学特性 |
| 文章编号： | 1672-8785（2007）02-0012-03 |
| 修稿时间： | 2006-09-14 |
Study of the Optical Characteristics of TiO2/SiO2 Nanomultilayers |
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| ZHANG Yang,WANG Wei,SHENG Gui-jin,TIAN Xia. Study of the Optical Characteristics of TiO2/SiO2 Nanomultilayers[J]. Infrared, 2007, 28(2): 12-14 |
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| Authors: | ZHANG Yang WANG Wei SHENG Gui-jin TIAN Xia |
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| Affiliation: | School of Science, Shenyang University of Technology, Shenyang 110023, China |
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| Abstract: | TiO2/SiO2 nanomultilayers were prepared on glass substrates with magnetron sputtering. The thickness and refractive index of the thin films were measured by an ellipsometer. The blackbody radiation experiment shows that the TiO2/SiO2 nanomultilayers have good infrared absorption within the wavelength range of 800nm - 1400nm, and the absorption coefficient increases as the temperature rises. The infrared spectroscopy shows that the TiO2/SiO2 nanomultilayers have good infrared absorption within the wavenumber range of 2300cm^-1 , 2900cm^-1. |
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| Keywords: | magnetron sputtering nanomultilayers optical characteristics |
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