| ZnO系薄膜对NOx气体的气敏光透射特性 |
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| 引用本文： | 贺洪波 范正修 易葵. ZnO系薄膜对NOx气体的气敏光透射特性[J]. 传感技术学报, 1999, 12(2): 123-126 |
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| 作者姓名： | 贺洪波 范正修 易葵 |
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| 作者单位： | 中国科学院上海光学精密机械研究所!上海201800 |
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| 摘 要： | 用射频磁控溅射方法制备了纯氧化锌（ＺｎＯ）薄膜和掺Ａｇ、掺Ｐｔ与掺Ｐｄ的ＺｎＯ三种气敏光学薄膜。测量了这些薄膜在ＮＯｘ气体中的透射光谱，然后由透射光谱获得了灵敏度的变化规律，并用吸附平衡关系式解释了气敏光透射特性，最终优化得到一种对ＮＯｘ气体灵敏度高的掺Ａｇ氧化锌薄膜。
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| 关 键 词： | 气敏薄膜 NOx气体 光透射 大气污染 氧化锌薄膜 |
The Gas Sensing Transmission Properties to NO_x of ZnO-series Thin films |
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| He Hongbo,Fan Zhengxiu,Yi Kui. The Gas Sensing Transmission Properties to NO_x of ZnO-series Thin films[J]. Journal of Transduction Technology, 1999, 12(2): 123-126 |
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| Authors: | He Hongbo Fan Zhengxiu Yi Kui |
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| Abstract: | Pure ZnO thin film is deposited by r. f. magnetron sputtering technique as well as three other gas sensing optical thin films, e. g., Ag-doped, Pt-doped and Pd-doped ZnO films. The transmission spectra to NO_x of these films are measured at first, then the variation of sensitivity is derived from the transmission spectra. The gas sensing transmission properties are analyzed by considering the adsorption equilibrium relation. An Agdoped ZnO thin film, with high sensitivity to NO_x is eventually obtained by optimizing the deposition process. |
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| Keywords: | gas sensing thin films of ZnO-series thin films NO_x gas transmission |
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