|
|||||
|
|
Theoretical and experimental investigation of rarefied gas flow in molecular pumps |
|
| Authors: | F Tazioukov P Ossipov A Burmistrov |
| Abstract: | The article presents a theoretical model for calculating the gas flow through channels with moving walls in the molecular flow regime. The analytical equations are solved by iteration techniques. The calculated data for the pumping speed and the compression ration of a molecular pump are compared with the experimental results. The agreement between calculated and measured values is good. |
| Keywords: | |