Zeolite-coated interdigital capacitors for humidity sensing |
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| Authors: | M UrbiztondoAuthor VitaeI PellejeroAuthor Vitae A RodriguezAuthor VitaeMP PinaAuthor Vitae J SantamariaAuthor Vitae |
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| Affiliation: | a Nanoscience Institute of Aragon, University of Zaragoza, 50018 Zaragoza, Spain
b Department of Electronic Engineering, Polytechnic University of Cataluña, 08034 Barcelona, Spain |
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| Abstract: | Inter-digital capacitors (IDCs) with electrode gaps of 10 or 50 microns have been coated with zeolite films consisting of different zeolites with Si/Al ratios ranging from 1.5 (zeolite A) to infinite (silicalite). The performance of the sensor in the measurement of humidity has been related to the electrical properties of the zeolites (relative permittivity, ?r), which in turn is a function of their Si/Al ratio. With zeolites of a high Al content the limit of detection was under 0.5 ppmV. |
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| Keywords: | Humidity sensors Interdigital capacitors (IDC) Zeolite |
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