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Hydrogen sensing performances of Pt/i-ZnO/GaN metal-insulator-semiconductor diodes
Authors:Hsin-Ying LeeAuthor VitaeHung-Lin HuangAuthor Vitae  Ching-Ting LeeAuthor Vitae
Affiliation:a Department of Electro-Optical Engineering, National Cheng Kung University, Tainan 701, Taiwan, ROC
b Institute of Electro-Optical Science and Engineering, National Cheng Kung University, Tainan 701, Taiwan, ROC
c Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan 701, Taiwan, ROC
Abstract:
Keywords:Hydrogen gas sensors   GaN   Intrinsic ZnO layer   Metal-insulator-semiconductor structure   Vapor cooling condensation system
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