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Contactless functional testing of grating-coupled evanescent wave (bio)chemical sensors |
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| Authors: | David PietroyAuthor VitaeOlivier ParriauxAuthor Vitae Thibaut EpalleAuthor VitaeSvetlen TonchevAuthor Vitae |
| Affiliation: | a Laboratoire des Technologies de la Microélectronique, 17 rue des Martyrs, 38000 Grenoble, France b Laboratoire Hubert Curien UMR CNRS 5516, 18 rue Benoit Lauras, Université de Lyon, 42000 Saint-Etienne, France c GIMAP Group on Mucosal Immunity and Pathogenic Agents, Université de Lyon, 42000 Saint-Etienne, France |
| Abstract: | The contactless measurement of the sole modulus of the reflection coefficient of a grating-coupled slab waveguide sensor at three definite points of the reflection spectrum gives all necessary information for the determination of the complete set of phenomenological parameters of a waveguide grating (bio)chemical sensor thanks to a physically meaningful representation of the resonant reflection of a free space wave in the form of a circle in the complex plane. This property leads to a simple, non-destructive, wafer-scale functional testing methodology for grating-coupled (bio)chemical sensor chips. |
| Keywords: | Waveguide gratings Resonant reflection Evanescent wave sensors Biosensors Wafer-level testing |
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