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ZnCdSe量子点的MOCVD生长及其演变
引用本文:单崇新,范希武,张吉英,张振中,王晓华,吕有明,刘益春,申德振,孔祥贵,吕少哲. ZnCdSe量子点的MOCVD生长及其演变[J]. 固体电子学研究与进展, 2002, 22(4): 429-432,440
作者姓名:单崇新  范希武  张吉英  张振中  王晓华  吕有明  刘益春  申德振  孔祥贵  吕少哲
作者单位:1. 中国科学院长春光学精密机械与物理研究所激发态物理重点实验室,130021
2. 中国科学院长春光学精密机械与物理研究所激发态物理重点实验室,130021;长春光学精密机械学院高功率半导体激光国家重点实验室,130022
基金项目:国家攀登计划,国家自然科学重大基金 (No.698962 60 ),中科院创新工程,中科院百人计划,国家自然科学基金支持
摘    要:利用应力释放模型计算了 Zn Cd Se/Ga As间的临界厚度 ,并以该临界厚度为基础 ,用 MOVCD设备在Stranski-Krastanow (S-K)生长模式下 ,外延生长了 Zn Cd Se量子点。用原子力显微镜和光谱测量的方法研究了量子点的演化过程。随着时间的推移 ,量子点发生了两种变化 ,即 Ostwald熟化过程和量子点的生成过程。另外 ,量子点由尖塔状逐渐演化为圆顶状。这种形状的变化可以用晶体生长模型进行解释。通过分析量子点样品的发光光谱 ,发现了两种发光机制 ,一种是零维量子点激子的发光 ,另一种是二维激子的发光。随着量子点生长完毕与加盖层之间间隔时间的增加 ,零维激子对二维激子发光的比值增加 ,且发光峰位明显红移。这从另一方面验证了由原子力显微镜直接观测到的量子点的演化过程

关 键 词:锌镉硒  量子点  金属有机物化学气相沉积  原子力显微镜
文章编号:1000-3819(2002)04-429-04

MOCVD Growth and Evolution of ZnCdSe Quantum Dots
SHAN Chongxin FAN Xiwu ZHANG Jiying ZHANG Zhengzhong WANG Xiaohua , LU Youming LIU Yichun SHEN Dezhen KONG Xianggui LU Shaozhe. MOCVD Growth and Evolution of ZnCdSe Quantum Dots[J]. Research & Progress of Solid State Electronics, 2002, 22(4): 429-432,440
Authors:SHAN Chongxin FAN Xiwu ZHANG Jiying ZHANG Zhengzhong WANG Xiaohua    LU Youming LIU Yichun SHEN Dezhen KONG Xianggui LU Shaozhe
Affiliation:SHAN Chongxin 1 FAN Xiwu 1 ZHANG Jiying 1 ZHANG Zhengzhong 1 WANG Xiaohua 1,2 LU Youming 1 LIU Yichun 1 SHEN Dezhen 1 KONG Xianggui LU Shaozhe 1
Abstract:ZnCdSe quantum dots were fabricated under Stranski Krastanow (S K) mode by metalorganic chemical vapor deposition (MOCVD). Previous to the growth, the critical thickness was calculated in terms of strain relaxation and the growth was then performed with the guidance of the calculation. the evolution of the QDs was also studied by atomic force microscopy (AFM) and spectroscopy. There appeared two kinds of variations in the QDs as time progresses, one is the Ostwald ripening process, the other is the dot formation process. Moreover, the shape of the dots changed from pyramid like to dome like, which was explained by the theory of crystal growth. By analyzing the photoluminescence spectra, two emission mechanisms were revealed, and they were thought to be the zero dimensional (0D) and 2D like excitons, respectively. With increasing the growth interruptions, the luminescence intensity ratio of the 0D to 2D like excitons increased, which gave further evidence of the evolution of QDs.
Keywords:ZnCdSe  quantum dots  MOCVD  atomic force microscopy
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