| 两步腐蚀法制备多晶硅绒面 |
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| 引用本文： | 张妹玉,陈朝. 两步腐蚀法制备多晶硅绒面[J]. 半导体光电, 2011, 32(2): 243-247 |
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| 作者姓名： | 张妹玉 陈朝 |
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| 作者单位： | 闽江学院物理学与电子信息工程系,福州,350108;厦门大学物理系,福建,厦门,361005;厦门大学能源学院,福建,厦门,361005 |
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| 基金项目： | 国家自然科学基金项目(61076056); 福建省重大专题项目(2007ZH0005-2); 闽江学院B类科研项目(YKY09003B) |
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| 摘 要： | 采用两步化学腐蚀法在多晶硅材料的表面制备了绒面结构,其中两步腐蚀法包括酸-碱两步腐蚀法和酸-酸两步腐蚀法。通过表面形貌SEM和反射谱的测试,详细地研究了不同腐蚀条件和腐蚀溶液制备绒面的形貌和光学特征。实验发现,当腐蚀速率较快时,多晶硅的绒面形貌会出现大量的晶界和针孔效应,并分析了其形成原因。同时,采用酸-碱两步腐蚀法的效果优于酸-酸两步腐蚀法的效果。最后,用PECVD在绒面上沉积SiNx减反射膜,使表面的反射率在600～800nm范围内降到3%左右,达到了良好的减反射效果,得出了最优的绒面制备方案。
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| 关 键 词： | 多晶硅 绒面 光学特性 |
Double Treatments of Multi-crystalline Silicon Texturing |
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| ZHANG Meiyu,CHEN Chao. Double Treatments of Multi-crystalline Silicon Texturing[J]. Semiconductor Optoelectronics, 2011, 32(2): 243-247 |
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| Authors: | ZHANG Meiyu CHEN Chao |
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| Affiliation: | ZHANG Meiyu1,CHEN Chao2,3(1.Department of Physics and Electronic Information Egineering,Minjiang University,Fuzhou 350108,CHN,2.Department of Physics,3.Academy of Energy Source,Xiamen University,Xiamen 361005,CHN) |
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| Abstract: | Multi-crystalline silicon wafers were textured by double chemical treatments,which include acid-alkali and double acid treatments.By using SEM and reflectance spectrum,detailed study of surface morphology and optical properties of different etched surfaces was carried out.The results show that a large number of grain boundary delineation and pinholes will produce when the etching rate is too fast,and the reason is also discussed.And the results of acid-alkali treatment are better than that of double acid tr... |
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| Keywords: | multi-crystalline silicon texturing optical properties |
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