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Nanostructured zinc oxide films synthesized by successive chemical solution deposition for gas sensor applications |
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| Authors: | O. Lupan L. Chow E. Monaico V. ?ontea A. Naitabdi A. Schulte |
| Affiliation: | a Department of Microelectronics and Semiconductor Devices, Technical University of Moldova, 168 Stefan cel Mare Blvd., MD-2004 Chisinau, Republic of Moldova b Department of Physics, University of Central Florida, 4000 Central Florida Blvd., Orlando, FL 32816-2385, USA c National Center for Materials Study and Testing, Technical University of Moldova, 168 Stefan cel Mare Blvd., MD-2004 Chisinau, Republic of Moldova |
| Abstract: | Nanostructured ZnO thin films have been deposited using a successive chemical solution deposition method. The structural, morphological, electrical and sensing properties of the films were studied for different concentrations of Al-dopant and were analyzed as a function of rapid photothermal processing temperatures. The films were investigated by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray spectroscopy, X-ray photoelectron and micro-Raman spectroscopy. Electrical and gas sensitivity measurements were conducted as well. The average grain size is 240 and 224 Å for undoped ZnO and Al-doped ZnO films, respectively. We demonstrate that rapid photothermal processing is an efficient method for improving the quality of nanostructured ZnO films. Nanostructured ZnO films doped with Al showed a higher sensitivity to carbon dioxide than undoped ZnO films. The correlations between material compositions, microstructures of the films and the properties of the gas sensors are discussed. |
| Keywords: | A. Nanostructures A. Oxides B. Chemical synthesis D. Electrical properties |
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