| 拓扑优化方法的研究现状及在微机构设计中的应用 |
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| 引用本文： | 褚金奎,郝秀春,王立鼎.拓扑优化方法的研究现状及在微机构设计中的应用[J].微纳电子技术,2003(Z1). |
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| 作者姓名： | 褚金奎 郝秀春 王立鼎 |
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| 作者单位： | 大连理工大学机械工程学院微系统研究中心 辽宁大连116024
(褚金奎，郝秀春)，大连理工大学机械工程学院微系统研究中心 辽宁大连116024(王立鼎) |
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| 摘 要： | 简要介绍了MEMS的设计现状和拓扑优化方法 ,并根据MEMS中微机构的特点 ,概述了拓扑优化方法在微机构中的应用。最后以微夹钳为例 ,对不同负载、不同约束情况下微夹钳结构进行了拓扑优化设计
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| 关 键 词： | MEMS 拓扑优化 微机构 |
Developments of topology optimization method and its application in micro-mechanism design |
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| CHU Jin kui,HAO Xiu chun,WANG Li ding.Developments of topology optimization method and its application in micro-mechanism design[J].Micronanoelectronic Technology,2003(Z1). |
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| Authors: | CHU Jin kui HAO Xiu chun WANG Li ding |
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| Abstract: | The present situation of MEMS and topology optimization method are briefly introduced. Based on the characteristic of micro mechanisms, the application of topology optimization method for design of micro mechanisms is described. Finally micro gripers are designed by topology optimization method with different loadcases and different constraints. |
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| Keywords: | MEMS topology optimization micro mechanisms |
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