Rearrangeable nonblocking SOI waveguide thermooptic 4/spl times/4 switch matrix with low insertion loss and fast response

A rearrangeable nonblocking 4/spl times/4 thermooptic silicon-on-insulator waveguide switch matrix at 1.55-/spl mu/m integrated spot size converters is designed and fabricated for the first time. The insertion losses and polarization-dependent losses of the four channels are less than 10 and 0.8 dB, respectively. The extinction ratios are larger than 20 dB. The response times are 4.6 /spl mu/s for rising edge and 1.9 /spl mu/s for falling edge.