| 薄膜气敏元件响应与膜厚的关系 |
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| 引用本文： | 林海安 吴冲若. 薄膜气敏元件响应与膜厚的关系[J]. 固体电子学研究与进展, 1994, 14(2): 172-176 |
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| 作者姓名： | 林海安 吴冲若 |
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| 作者单位： | 东南大学电子工程系 |
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| 摘 要： | 建立了薄膜气敏元件响应与膜厚的关系。指出随着膜厚减小，元件响应呈上升、下降、再上升的规律，且较好地解释了实验发现的响应与膜厚的关系对还原性气体种类的依赖。
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| 关 键 词： | 簿膜，气敏元件，响应，膜厚 |
The Relation Between Response and Thickness of Thin Film Gas Sensors |
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| Lin Haian, Wu Chongrou. The Relation Between Response and Thickness of Thin Film Gas Sensors[J]. Research & Progress of Solid State Electronics, 1994, 14(2): 172-176 |
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| Authors: | Lin Haian Wu Chongrou |
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| Abstract: | or thin film gas sensors,the relation between response and thickness has been established. It is pointed out that when the thickness of thin film decreases,the response of gas sensor will increase at first, decrease secondly and then increase again. The dependence of the relation between response and thickness,which was observed in experiments on the different reducing gases is well explained. |
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| Keywords: | Thin Film Gas Sensors Response Thickness |
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