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| SiCl4氢化转化为SiHCl3过程的热力学 | |
| 引用本文： | 侯彦青,谢刚,陶东平,俞小花,李荣兴,宋东明.SiCl4氢化转化为SiHCl3过程的热力学[J].中国有色金属学报,2011,21(12). |
| 作者姓名： | 侯彦青 谢刚 陶东平 俞小花 李荣兴 宋东明 |
| 作者单位： | 1. 昆明理工大学冶金与能源工程学院,昆明,650093 2. 昆明理工大学冶金与能源工程学院,昆明650093;云南冶金集团总公司技术中心,昆明650031 3. 昆明理工大学冶金与能源工程学院,昆明650093;昆明冶研新材料股份有限公司,昆明650031 |
| 基金项目： | 国家自然科学基金资助项目(50574045) |
| 摘 要： | 应用有关热力学数据研究了与多晶硅主要生产工艺即西门子法相关的“Si-Cl-H”三元系的复杂化学反应,研究SiCl4氢化转化为SiHCl3过程中可能发生的15个反应,给出15个反应的ΔGθm -T图；并确定5个独立的反应,给出这5个独立反应的KθP -T图;高温时主反应(1)的Kp增长较慢,而反应(2)和(5)的KθP快速增大,1 373K时,主反应(1)的KθP较小,为0.157 1.进一步研究温度、压强和进料配比nH2/nsicl4对SiCl4氢化率的影响,并绘制出SiCl4氢化率随这些因素的变化曲线.结果表明:当压强和进料配比一定时,SiCl4的氢化率随温度的升高先增加后降低;增大压强或增加进料配比nH2/nsiCl4都会提高SiCl4的氢化率;SiCl4氢化转化为SiHCl3过程的最佳操作条件为温度为1 000℃,压强为0.3 MPa,进料配比nH,/nSiCl4为4,在此条件下,SiCl4的氢化率为25.78％. |
| 关 键 词： | SiCl4 SiHCl3 热力学 转化 |
Thermodynamics of transformation process from SiCl_4 to SiHCl_3 |
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| HOU Yan-qing , XIE Gang , TAO Dong-ping , YU Xiao-hua , LI Rong-xing , SONG Dong-ming.Thermodynamics of transformation process from SiCl_4 to SiHCl_3[J].The Chinese Journal of Nonferrous Metals,2011,21(12). | |
| Authors: | HOU Yan-qing XIE Gang TAO Dong-ping YU Xiao-hua LI Rong-xing SONG Dong-ming |
| Affiliation: | HOU Yan-qing1,XIE Gang1,2,TAO Dong-ping1,YU Xiao-hua1,LI Rong-xing1,SONG Dong-ming1,3(1.Faculty of Metallurgical and Energy Engineering,Kunming University of Science and Technology,Kunming 650093,China,2.Technology Center,Yunnan Metallurgy Group Co.,Kunming 650031,3.Kunming Yeyan New-Material Co.,Ltd.,China) |
| Abstract: | Based on the thermodynamic data for the related pure substances,fifteen possible chemical reactions in the SiCl4 hydrogenation system of Siemens process that is one of the main process for the polysilicon production were studied.The curves of the fifteen chemical reactions in the system versus temperature were fitted by the assistant of computer.The values of for most reactions are greater than zero at the range of 973K to 1 773 K.That is to say that the value of equilibrium constant is small.Therefore,the ... |
| Keywords: | SiCl4 SiHCl3 thermodynamics transformation |
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