| Ba0.6Sr0.4TiO3薄膜的微结构及铁电性能研究 |
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| 引用本文： | 陈宏伟,杨传仁,符春林,赵莉,高志强.Ba0.6Sr0.4TiO3薄膜的微结构及铁电性能研究[J].真空科学与技术学报,2005,25(2):96-99. |
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| 作者姓名： | 陈宏伟 杨传仁 符春林 赵莉 高志强 |
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| 作者单位： | 电子科技大学微电子与固体电子学院,成都,610054 |
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| 基金项目： | 国家重点基础研究发展计划(973计划) |
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| 摘 要： | 采用射频磁控溅射法制备了Ba0.6Sr0.4TiO3(简称BST)薄膜材料,研究了BST薄膜的组成、晶体结构、表面形貌及介电性能.介电偏压特性曲线和电滞回线都表明其具有铁电性,厚度为500 nm、晶粒尺寸为30 nm的BST薄膜,介电系数电压变化率(介电调谐率)为29.4%,矫顽场强(EC)约为12.1 kV/cm,并讨论了介电偏压特性曲线和电滞回线之间的联系,解释了电滞回线不对称的原因.
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| 关 键 词： | 钛酸锶钡 薄膜 铁电 射频磁控溅射 |
| 文章编号： | 1672-7126(2005)02-0096-04 |
| 修稿时间： | 2004年10月15 |
Microstructures and Ferroelectric Properties of Ba0.6Sr0.4TiO3 Thin Films |
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| Chen Hongwei,Yang Chuanren,Fu Chunlin,Zhao Li,Gao Zhiqiang.Microstructures and Ferroelectric Properties of Ba0.6Sr0.4TiO3 Thin Films[J].JOurnal of Vacuum Science and Technology,2005,25(2):96-99. |
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| Authors: | Chen Hongwei Yang Chuanren Fu Chunlin Zhao Li Gao Zhiqiang |
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| Abstract: | Barium strontium titanate (BST) thin films were prepared by RF magnetron sputtering.The composition,crystalline structure,surface morphology and dielectric properties of BST thin films were studied.The ferroelectric properties were demonstrated by the curve of capacitance-voltage and the hysteresis loop.The tunability and the coercive electric field of the BST film,with thickness of 500 nm and grain size of 30 nm,are 29.4% and 12.1 kV/cm,respectively.The origin of the asymmetric hysteresis and the relationship between the curve of capacitance-voltage and the hysteresis loop are also discussed. |
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| Keywords: | Barium strontium titanate Thin film Ferroelectric RF magnetron sputtering |
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