| 多弧离子镀TiN涂层的N_2/Ar流量参数研究 |
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| 引用本文： | 陈昌浩,金永中,陈建,蔡瑜,余学金,龙国俊. 多弧离子镀TiN涂层的N_2/Ar流量参数研究[J]. 粉末冶金工业, 2016, 0(3): 44-48. DOI: 10.13228/j.boyuan.issn1006-6543.20150055 |
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| 作者姓名： | 陈昌浩 金永中 陈建 蔡瑜 余学金 龙国俊 |
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| 作者单位： | 四川理工学院材料科学与工程学院,四川自贡,643000 |
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| 基金项目： | 四川省科技厅资助项目(15010112)；自贡市科技局项目(2015HX19)；四川理工学院科研培育项目(2014PY10) |
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| 摘 要： | 利用多弧离子镀在硬质合金基体上制备TiN涂层,研究了N_2/Ar流量比对TiN涂层表面大颗粒分布与力学性能的影响。通过扫描电镜观察TiN涂层的表面形貌,并利用Image J图像处理软件对大颗粒的数量和尺寸进行了分析,通过自动划痕仪和纳米压痕仪对涂层的力学性能进行表征。结果表明:随着N2流量的增加,涂层表面沉积颗粒的最大直径和平均直径逐渐减小,涂层的附着力整体呈现增加趋势,显微硬度则先增大后减小。
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| 关 键 词： | 多弧离子镀 TiN涂层 N2/Ar流量比 大颗粒 力学性能 |
Study on N2/Ar flow parameters of TiN coating deposited by multi-arc ion plating |
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| Abstract: | TiN coating was deposited on the surface of cemented carbide substrate by multi-arc ion plating. The influ-ence of N2/Ar flow rate on the distribution of microparticles (MPs) and mechanical properties of TiN coating was stud-ied. The surface morphologies of TiN film were observed by scanning electron microscope. The amount and size of MPs were analyzed by ImageJ software. Scratch spectrometer and nanoindenter were used to evaluate mechanical properties of TiN coating. The results show that the maximum size and average diameter of MPs decrease with the increase of N2 flow,and the adhesion strength of TiN coating goes up,while the micro-hardness of TiN coating increases firstly and then decreases. |
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| Keywords: | multi-arc ion plating TiN coating N2/Ar flow rate microparticle mechanical property |
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