Structural and gas-sensing properties of nanometre tin oxide prepared by PECVD |
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| Authors: | Y. Liu W. Zhu O. K. Tan X. Yao Y. Shen |
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| Affiliation: | (1) Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, 2263 Singapore;(2) Department of Materials Science, University of Science and Technology of China, 230026 Hefei, China |
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| Abstract: | A low-temperature plasma-enhanced chemical vapour deposition (PECVD) technique has been employed to produce ultrafine tin oxide powders. The structural features and phase transition of this material have been characterized using differential thermal analysis (DTA), thermogravimetric analysis (TGA), X-ray diffraction, infrared spectroscopy (IR) and transmission electron microscopy (TEM). The oxygen absorption behaviour and gassensing properties have been investigated by electron paramagnetic resonance (EPR), X-ray photoelectron spectroscopy (XPS) and electrical measurements. Thick film gas sensors made from such ultrafine SnO2 powders yield better sensitivities than those of normal undoped SnO2 gas sensors. A gas-sensing reaction mechanism is also proposed. |
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