(2 0 0)-Texture and microstructure of MgO films by rf-magnetron sputtering in Ar plus N2 atmosphere

Intensity of the (2 0 0) peak in the X-ray diffraction pattern of the MgO film increases as N₂ is added to Ar gas during MgO deposition. The optimum flow rate ratio of N₂ to Ar in order to obtain maximum intensity of the MgO (2 0 0) peak is 2:5. As introducing N₂ gas, no residual nitrogen atoms are found in the MgO films, which are confirmed by AES and ESCA analysis. On the other hand, the TEM dark field image shows that the average grain size of MgO film increases with increasing the flow rate ratio of N₂ to Ar. This is due to that the deposition rate of MgO film is decreased with increasing the flow rate ratio of N₂ to Ar.