| 甲烷浓度对金刚石薄膜质量的影响 |
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| 引用本文： | 史新伟,安子凤,张水,宋开兰,姚宁,王新昌. 甲烷浓度对金刚石薄膜质量的影响[J]. 真空, 2011, 48(5): 64-67 |
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| 作者姓名： | 史新伟 安子凤 张水 宋开兰 姚宁 王新昌 |
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| 作者单位： | 郑州大学物理工程学院,材料物理教育部重点实验室,河南郑州450052 |
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| 基金项目： | 国家自然科学基金项目(No.61076041,50702051); 河南省科技攻关项目(No.0624250014); 郑州大学校内培育基金项目 |
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| 摘 要： | 纳米金刚石薄膜具有优异的性能,已在多个领域获得广泛应用.但微波等离子体化学气相沉积制备的金刚石薄膜质量却严重受沉积工艺的影响,为了深入了解沉积工艺对制备的金刚石薄膜质量的影响,本文详细研究了甲烷浓度对微波等离子体化学气相沉积( MPCVD)金刚石薄膜质量的影响,利用扫描电镜、X射线衍射、拉曼光谱以及原子力显微镜对其进行...
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| 关 键 词： | 金刚石薄膜 化学气相沉积 沉积工艺 |
Effect of methane concentration on the performance of diamond films prepared by MPCVD |
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| SHI Xin-Wei,AN Zi-feng,ZHANG Shui,SONG Kai-lan,YAO Ning,WANG Xin-Chang. Effect of methane concentration on the performance of diamond films prepared by MPCVD[J]. Vacuum(China), 2011, 48(5): 64-67 |
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| Authors: | SHI Xin-Wei AN Zi-feng ZHANG Shui SONG Kai-lan YAO Ning WANG Xin-Chang |
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| Affiliation: | SHI Xin-Wei,AN Zi-feng,ZHANG Shui,SONG Kai-lan,YAO Ning,WANG Xin-Chang(Key Laboratory of Material Physics,the Ministry of Education,Physical Science & Technology College,Zhengzhou University,Zhengzhou 450052,China) |
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| Abstract: | Nanocrystalline diamond films with outstanding performance have been widely used in many fields.But the diamond films deposited by microwave plasma chemical vapor deposition(MPCVD) are usually affected severely by the deposition process.The effect of methane concentration on the quality of diamond films deposited by MPCVD was studied in detail.FE-SEM,XRD,Raman and AFM was carried out for structural characterization,and the effect of methane concentration on the quality of prepared diamond films was analyzed... |
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| Keywords: | diamond film chemical vapor deposition deposition process |
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