| 碳管炉真空系统的检漏 |
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| 引用本文： | 贾佳林,熊晓梅,纪平,李高山,闫果,李成山.碳管炉真空系统的检漏[J].真空,2011,48(6). |
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| 作者姓名： | 贾佳林 熊晓梅 纪平 李高山 闫果 李成山 |
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| 作者单位： | 西北有色金属研究院超导材料研究所,陕西西安,710016 |
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| 摘 要： | 本文主要论述了碳管炉真空系统的组成及特点,利用静态压升检漏法和氦质谱检漏两种手段评定碳管炉密封性的好坏,此方法对真空热处理设备及类似装备的设计、检漏具有很好的指导意义.
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| 关 键 词： | 压升率 真空 检漏 氦质谱检漏 |
Leak detection for the vacuum system of carbon tube furnace |
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| JIA Jia-lin,XIONG Xiao-mei,JI Ping,LI Gao-shan,YAN Guo,LI Cheng-shan.Leak detection for the vacuum system of carbon tube furnace[J].Vacuum,2011,48(6). |
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| Authors: | JIA Jia-lin XIONG Xiao-mei JI Ping LI Gao-shan YAN Guo LI Cheng-shan |
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| Affiliation: | JIA Jia-lin,XIONG Xiao-mei,JI Ping,LI Gao-shan,YAN Guo,LI Cheng-shan(Superconducting Materials Research Centre,Northwest Institute for Nonferrous Metal Research,Xi'an,710016,China) |
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| Abstract: | In this paper,the constitution and characteristics of the vacuum system of carbon tube furnace was introduced.Two independent methods,static pressure measurement and helium mass spectrometer leak detection,were combined to evaluate the pressure rise rate and leak rate of the carbon tube furnace,respectively.The results show that the combination of these two methods is of great importance for the leak detection and design of all the similar vacuum heat treatment equipments. |
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| Keywords: | pressure rise rate vacuum leak detection helium mass spectrometer leak detection |
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