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CNTs-TiO2复合薄膜的场发射及其在电离规中的应用
引用本文:何凯旋,苏娟,郭等柱,张耿民. CNTs-TiO2复合薄膜的场发射及其在电离规中的应用[J]. 真空电子技术, 2011, 0(5): 37-42
作者姓名:何凯旋  苏娟  郭等柱  张耿民
作者单位:北京大学电子系,北京,100871
基金项目:国家自然科学基金资助项目
摘    要:介绍一种制备碳纳米管(CNTs)薄膜的方法—擦涂法。利用这种方法制备了CNTs薄膜以及CNTs-TiO2复合薄膜,对其场发射性能进行了研究,发现CNTs+(7%~10%(质量比))TiO2复合薄膜的场发射性能与纯CNTs薄膜相比有较大改善,开启电场由2.5V/μm降低到1.3V/μm,阈值电场由4V/μm降低到3.1V/μm,场发射的均匀性与稳定性也有显著的提高。利用CNTs+7%TiO2薄膜样品作为电离真空规的冷阴极,实现了在2×10-2~3×10-5 Pa范围内的近似线性响应,灵敏度约为3.36Pa-1。这种电离真空规具有体积小、低能耗的特点。

关 键 词:碳纳米管  TiO2纳米颗粒  场发射  电离规

Field Emission and Their Application in Ionization Gauge of CNTs-TiO2 Films
HE Kai-xuan,SU Juan,GUO Deng-zhu,ZHANG Geng-min. Field Emission and Their Application in Ionization Gauge of CNTs-TiO2 Films[J]. Vacuum Electronics, 2011, 0(5): 37-42
Authors:HE Kai-xuan  SU Juan  GUO Deng-zhu  ZHANG Geng-min
Affiliation:HE Kai-xuan,SU Juan,GUO Deng-zhu,ZHANG Geng-min (Department of Electronic,Peking University,Beijing 100871,China)
Abstract:We present a simple rubbing method for fabricating films of carbon nanotubes(CNTs) and CNTs-based composite materials.The CNT films and CNTs-TiO2 films are fabricated utilizing this method.The field emission properties of the films are systematically studied in comparison experiments.It is found that,with an optimum proportion(7%~10%)(wt.) of TiO2 nanoparticles mixed with the CNTs,the field emission properties of the composite films could be dramatically improved compared with simplex CNT films,in lowering ...
Keywords:Carbon nanotubes  TiO2 Nanoparticles  Field emission  Ionization gauge  
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