两片大面积玻璃同时反应溅射沉积Al2O3均匀性试验

本工作设计制作了一种新型的三段式反应气体进气系统.该进气系统由镀膜真空室内和室外两部分结构组成.真空室内的进气主管由三段进气分管组成,其上装有等间距的进气喷嘴.真空室外装有与各进气分管对应的流量调节针阀.调试反应溅射Al2O3均匀性的方法如下.首先粗调流量调节针阀,改变各进气分管间的反应气体进气流量分布,然后更换不同横截面积的进气喷嘴,进一步调节反应气体进气流量沿靶长度方向分布.交替重复以上调试过程2～3次,即可获得沿靶长度方向上反应溅射沉积均匀、透明的A12O3薄膜.本工作在高1650 mm,宽2440 mm的靶前后两块大面积玻璃上,试验沉积了Al2O3/Ag/Al2O3低辐射薄膜.结果表明沉积的低辐射膜在靶前后两块大面积玻璃上均匀性好,可见光吸收比相对标准偏差小于4％.

The uniformity experimentation of Al2O3 films simultaneously deposited on two large-area glasses by reactive sputtering

A reactive gas injection system with three segments was designed and developed,which consists of two parts inside and outside the coating chamber.The main gas injection pipe inside the chamber consists of three sub-pipes,on which gas inlet nozzels with the same separated distance were installed.There are needle valves for flow adjusting connected to the corresponding sub-pipes outside the coating chamber.The method to adjust the uniformity of reactively sputtered Al2O3 films is as follows.First,adjust needl...