| 基于FPGA的数字化中频磁控溅射电源设计 |
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| 引用本文： | 刘艺超,陈文光,饶益花,李云程.基于FPGA的数字化中频磁控溅射电源设计[J].真空,2011,48(6). |
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| 作者姓名： | 刘艺超 陈文光 饶益花 李云程 |
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| 作者单位： | 1. 南华大学电气工程学院,湖南衡阳,421001
2. 衡阳市真空机电设备有限公司,湖南衡阳,421001 |
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| 摘 要： | 介绍了一种全数字控制的中频磁控溅射电源设计.主电路前级采用直流斩波调压,后级采用全桥逆变的电路结构.控制电路由现场可编程门阵列(FPGA)计算产生高分辨率的数字脉宽调制信号(DPWM)实现.电源工作于恒流模式,通过PID算法调节Buck斩波电路的驱动DPWM来实现闭环控制.全桥逆变电路的驱动信号由FPGA计算产生,通过按键可设置驱动的DPWM,输出所需的固定频率和占空比的矩形波.对于靶面微打弧和强打弧,FPGA采取不同的保护措施.最后制作了5kW的样机进行验证,实验证明,方法可行,具有好的应用前景.
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| 关 键 词： | 中频磁控溅射电源 Buck斩波 数字化控制器 FPGA |
Design of digital controlled mid-frequency magnetron sputtering power supply based on FPGA |
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| LIU Yi-chao,CHEN Wen-guang,RAO Yi-hua,LI Yun-cheng.Design of digital controlled mid-frequency magnetron sputtering power supply based on FPGA[J].Vacuum,2011,48(6). |
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| Authors: | LIU Yi-chao CHEN Wen-guang RAO Yi-hua LI Yun-cheng |
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| Affiliation: | LIU Yi-chao1,CHEN Wen-guang1,RAO Yi-hua1,LI Yun-cheng2(1.College of Electrical Engineering,University of South China,Hengyang 421001,China,2.Hengyang Vacuum M/E Equipment Company,China) |
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| Abstract: | A digital controlled mid-frequency magnetron sputtering power supply based on FPGA was introduced.A Buck Chopper and full bridge inverter were applied to the main circuit.The control circuit performance was based on precise digital pulse width modulator(DPWM) signal produced by field programmable gate array(FPGA).Power supply was operated in constant current mode,the Buck Chopper's duty cycle was adjusted via PID arithmetic to achieve closed-loop control.The full bridge inverter's driving signals were calcu... |
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| Keywords: | mid-frequency magnetron sputtering power supply Buck Chopper digital controller FPGA |
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