| 镶嵌结构界面金刚石涂层研究进展 |
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| 引用本文： | 邱万奇,陈星婷,刘仲武,钟喜春,余红雅,曾德长.镶嵌结构界面金刚石涂层研究进展[J].真空科学与技术学报,2011,31(6):691-695. |
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| 作者姓名： | 邱万奇 陈星婷 刘仲武 钟喜春 余红雅 曾德长 |
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| 作者单位： | 华南理工大学材料科学与工程学院 广州510640 |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 对平面结构和镶嵌结构界面金刚石涂层的界面结构特点、受弯曲应力应变时的失效方式进行了分析,指出镶嵌结构界面金刚石涂层是提高膜/基体结合力的有效方法;综述了镶嵌结构界面金刚石涂层的国内外研究现状,并指出了今后镶嵌结构界面金刚石涂层的发展方向。
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| 关 键 词： | 金刚石 镶嵌 化学气相沉积 结合力 研究进展 |
Latest Progress in Synthetic Inlay Structured Diamond Coatings |
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| Qiu Wanqi,Chen Xingting,Liu Zhongwu,Zhong Xichun,Yu Hongya,Zeng Dechang.Latest Progress in Synthetic Inlay Structured Diamond Coatings[J].JOurnal of Vacuum Science and Technology,2011,31(6):691-695. |
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| Authors: | Qiu Wanqi Chen Xingting Liu Zhongwu Zhong Xichun Yu Hongya Zeng Dechang |
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| Affiliation: | Qiu Wanqi,Chen Xingting,Liu Zhongwu,Zhong Xichun,Yu Hongya,Zeng Dechang(School of Materials Science and Engineering,South China University of Technology,Guangzhou 510640,China) |
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| Abstract: | The latest progress in the fields of synthesis of the plane and inlay structured diamond coatings,the adhesion strength and microstructures at the interface of the coating and substrate,and the mechanisms responsible for cracking and failures under bending stress was tentatively reviewed in a thought-provoking way.The discussions centered on the state-of-the-art synthesis technologies of the inlay structured diamond coatings,the intensively studied subjects of basic interest,and the development trends.The p... |
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| Keywords: | Diamond Inlay structure Chemical vapor deposition Adhesive strength Development tendency |
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