微弧氧化法制备BaTiO3薄膜的结构特性

利用微弧氧化技术在钛衬底上制备了钛酸钡铁电薄膜.利用x射线(XRD)、扫描电镜(SEM)和能谱仪(EDS)等手段研究了电流密度和电解液浓度对微弧氧化薄膜的化学成分、相组成、结构和表面形貌的影响.结果表明,随着电流密度和电解液浓度的增加,BaTiO3的形成能力增强,薄膜的致密度下降,表面粗糙度增加;当Ba(OH)2浓度为0.2 mol/l,电流密度为5 A/cm2,微弧氧化反应18 min后,可获得具有较高简单四方结构和底心正交结构BaTiO3含量的薄膜,且薄膜与衬底具有良好的结合性能.

Structural characteristics of BaTiO3 films prepared by microarc oxidation

BaTiO3 ferroelectric films were prepared on titanium substrates by microarc oxidation technology.The effects of current density and electrolytic concentration on chemical composition,crystal phase,and surface morphologies of the films were characterized by XRD,SEM and EDS.The results show that the compactability of the film decreases,and the formation ability of BaTiO3 and surface roughness of the film increase with the increase of current density and the electrolytic concentration.Films with primitive tetragonal and end-centered orthorhombic BaTiO3 could been obtained in 0.2 mol/l Ba(OH)2 solution after 18min oxidation with current density of 5A/cm2,and they cohered well with the substrates.