| Abstract: | To use carbon nanotubes (CNTs) as anode material for the solid‐state thin‐film Li‐ion rechargeable battery, the tubes are preferred to be aligned perpendicular to a substrate and the CNT thin film to have a smooth surface. Using an Ar‐ion sputtering technique, we carried out the surface modifications of the CNT thin film prepared by the SiC surface decomposition method. In order to evaluate the surface modification, the surface and cross section of the modified CNT film were investigated by field‐emission scanning electron microscopy and atomic force microscopy. © 2012 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc. |
