表面形貌的研究现状及发展趋势

对国内外表面形貌测量仪器、表征方法研究情况进行了阐述,并指出了其发展趋势。随着纳米技术、激光测量等相关技术的发展和新的先进数学方法,如分形理论、小波分析等应用于表面表征中,表面测量仪器、表征方法也越来越多;二维参数表征已不能满足工程界的要求,三维表征参数将取代原来的二维参数;粗糙表面的分形特性研究主要集中在机加工表面与磨损表面,开展密封表面的分形特性研究将大大促进密封技术的发展。

The Research Status and Development Tendency of Surface Topography

The research status of surface topography measurement apparatus and characterization methods were introduced,and the development tendency of them was pointed out.With the development of various kinds of surfacerelated technology such as nano-technology and laser measurement method,more and more measurement apparatuses and quantitative characterization methods are developed.Especially in recent years,many new and advanced mathematical methods such as fractal and wavelet are properly applied to the field of surface characterization.2D parameters can not satisfy the engineering needs,so 3D Parameters will substitute for the previous 2D parameters in the future.The research of the fractal characterization of rough surfaces is concentrated in machined surfaces and wearing surfaces.The research of fractal characterization of seal surfaces will further the seal technology.