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使用GaAs MMIC技术的X波段微波频率检测器
引用本文:张俊,廖小平,焦永昌. 使用GaAs MMIC技术的X波段微波频率检测器[J]. 半导体学报, 2009, 30(4): 044009-4
作者姓名:张俊  廖小平  焦永昌
作者单位:Laboratory;MEMS;Ministry;Education;Southeast;University;
基金项目:国家高技术研究发展计划
摘    要:The design, fabrication, and experimental results of an MEMS microwave frequency detector are presented for the first time. The structure consists of a microwave power divider, two CPW transmission lines, a microwave power combiner, an MEMS capacitive power sensor and a thermopile. The detector has been designed and fabricated on GaAs substrate using the MMIC process at the X-band successfully. The MEMS capacitive power sensor is used for detecting the high power signal, while the thermopile is used for detecting the low power signal. Signals of 17 and 10 dBm are measured over the X-band. The sensitivity is 0.56 MHz/fF under 17 dBm by the capacitive power sensor, and 6.67 MHz / μV under 10 dBm by the thermopile, respectively. The validity of the presented design has been confirmed by the experiment.

关 键 词:微波功率合成  频率检测器  X波段  IC技术  砷化镓  电容式传感器  MEMS技术  功率分频器
收稿时间:2008-09-23
修稿时间:2008-09-23

Microwave frequency detector at X-band using GaAs MMIC technology
Zhang Jun,Liao Xiaoping and Jiao Yongchang. Microwave frequency detector at X-band using GaAs MMIC technology[J]. Chinese Journal of Semiconductors, 2009, 30(4): 044009-4
Authors:Zhang Jun  Liao Xiaoping  Jiao Yongchang
Affiliation:Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China;Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China;Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China
Abstract:The design, fabrication, and experimental results of an MEMS microwave frequency detector are pre-sented for the first time. The structure consists of a microwave power divider, two CPW transmission lines, a mi-crowave power combiner, an MEMS capacitive power sensor and a thermopile. The detector has been designed and fabricated on GaAs substrate using the MMIC process at the X-band successfully. The MEMS capacitive power sensor is used for detecting the high power signal, while the thermopile is used for detecting the low power signal. Signals of 17 and 10 dBm are measured over the X-band. The sensitivity is 0.56 MHz/fF under 17 dBm by the capac-itive power sensor, and 6.67 MHz/V under 10 dBm by the thermopile, respectively. The validity of the presented design has been confirmed by the experiment.
Keywords:MEMS   frequency   detector   microwave   power divider   frequency measurement
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