| MEMS波长可调谐激光器及其进展 |
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| 引用本文： | 罗雁横,张瑞君.MEMS波长可调谐激光器及其进展[J].微纳电子技术,2006,43(5):214-218. |
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| 作者姓名： | 罗雁横 张瑞君 |
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| 作者单位： | 中国电子科技集团公司第44研究所,重庆,400060 |
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| 摘 要： | 论述了MEMS波长可调谐激光器及其进展。介绍了几种不同类型的波长可调谐激光器,如基于表面微机械反射镜的MEMS可调谐激光器、基于深腐蚀圆形反射镜的MEMS可调谐激光器、基于闪耀光栅的MEMS可调谐激光器、基于阵列集成的MEMS可调谐DFB激光器和VCSEL基MEMS可调谐激光器。
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| 关 键 词： | 微电子机械系统 波长可调谐 激光器 |
| 文章编号： | 1671-4776(2006)05-0214-05 |
| 收稿时间： | 2005-12-21 |
| 修稿时间： | 2005年12月21 |
MEMS Wavelength Tunable Lasers and Progress |
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| LUO Yan-heng,ZHANG Rui-jun.MEMS Wavelength Tunable Lasers and Progress[J].Micronanoelectronic Technology,2006,43(5):214-218. |
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| Authors: | LUO Yan-heng ZHANG Rui-jun |
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| Affiliation: | The 44th Research Institute, CETC, Chongqing 400060, China |
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| Abstract: | wavelength MEMS wavelength tunable lasers and its progress were preserted. Different kinds of tunable lasers were introduced, such as MEMS tunable laser based on surface-micromachined mirror, deep-etched circular mirror, blazed grating, array integration and VCSEL. |
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| Keywords: | microelectromechanical systems(MEMS) wavelength tunable laser |
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