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软X射线掠入射光学散射特性的研究
引用本文:陈淑妍,张大威,陈波.软X射线掠入射光学散射特性的研究[J].激光与光电子学进展,2006,43(4):53-55.
作者姓名:陈淑妍  张大威  陈波
作者单位:1. 中国科学院长春光学精密机械与物理研究所,长春,130033;中国科学院研究生院,北京,100039
2. 中国科学院长春光学精密机械与物理研究所,长春,130033
基金项目:国家高技术研究发展计划(863计划)
摘    要:介绍了短波段掠入射表面散射线性模型,并且根据这个理论,分析计算了不同的波长和掠射角对软X射线掠入射光学散射特性的影响。随着波长的减小、掠射角的加大,软X射线掠入射光学散射现象越来越严重。

关 键 词:表面散射  软X射线  掠射角  波长
收稿时间:2005-08-08
修稿时间:2005-08-082005-09-15

Study of Soft X-ray Grazing Incidence Optical Scattering Phenomena
CHEN Shuyan,ZHANG Dawei,CHEN Bo.Study of Soft X-ray Grazing Incidence Optical Scattering Phenomena[J].Laser & Optoelectronics Progress,2006,43(4):53-55.
Authors:CHEN Shuyan  ZHANG Dawei  CHEN Bo
Affiliation:1 Changchun Institute of Optics, Fine Mechanics, and Physics, The Chinese Academy of Sciences, Changchun 130033; 2 Graduate School of the Chinese Academy of Sciences, Beijing 100039
Abstract:A linear system treatment of short-wavelength surface scattering theory is introduced, based on which, features of soft X-ray grazing incidence optical scattering are investigated when the wavelength and the grazing angle is different. It is discovered that the scattering increases as the grazing angle increases or the wavelength decreases.
Keywords:surface scattering phenomenon  soft x-ray  grazing angle  wavelength
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