| 热蒸发制备的硫化锌薄膜的结构分析 |
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| 引用本文： | 柳兆洪,陈谋智,林爱清,刘瑞堂,刘向鑫. 热蒸发制备的硫化锌薄膜的结构分析[J]. 微纳电子技术, 1998, 0(1) |
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| 作者姓名： | 柳兆洪 陈谋智 林爱清 刘瑞堂 刘向鑫 |
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| 作者单位： | 厦门大学物理系 |
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| 摘 要： | 用双舟热蒸发制备了掺稀土硫化锌薄膜，用ｘ射线衍射技术对硫化锌粉末和所制薄膜的晶体相结构进行研究，发现硫化锌薄膜的晶体结构与硫化锌粉末的晶体结构不同。薄膜晶体的生长受诸多因素影响，有择优取向生长趋势，是二维层状结构沿ｃ轴方向的密堆积。这些研究为高新材料的研制提供了参考。
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| 关 键 词： | 薄膜晶体，相结构，择优取向生长 |
Structural Analysis of ZnS Thin Film Prepared by Thermal Evaporation |
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| Liu Zhaohong, Chen Mouzhi, Lin Aiqing, Liu Ruitang, Liu Xiangxin. Structural Analysis of ZnS Thin Film Prepared by Thermal Evaporation[J]. Micronanoelectronic Technology, 1998, 0(1) |
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| Authors: | Liu Zhaohong Chen Mouzhi Lin Aiqing Liu Ruitang Liu Xiangxin |
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| Abstract: | ZnS thin films doped with erbium are prepared by thermal evaporation with two boats , and the crystalline phase structures of ZnS powder and the prepared films are studied using x-ray diffraction technique. lt is found that the structure of ZnS film is dif- ferent from that of ZnS powder. The growth of film crystal is affected by numbers of factors and tends to a preferential orientation. The film is two-dimensional layer struc- ture packing along c axis. lt provides basis for research on new luminescence material with high efficiency. |
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| Keywords: | Film crystal Phase structure Growth in preferential orientation |
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