溶液组成对喷雾热解法制备氟掺杂二氧化锡导电薄膜性能的影响

以四氯化锡和氟化铵为原料,异丙醇和水为溶剂,采用喷雾热解法,在载玻片上制备氟掺杂二氧化锡导电薄膜(fluorine-doped tin oxide,FTO)。研究了四氯化锡浓度、氟化铵浓度、双氧水浓度、异丙醇与水的体积比对FTO薄膜的透光率和方块电阻的影响。运用X射线衍射仪、扫描电子显微镜、紫外-可见分光光度计和四探针测试仪分别对FTO薄膜进行了表征。结果表明:在喷雾热解液中加入少量的H2O2(0.05mol/L)可明显提高FTO薄膜在可见光区的透光率,而不影响其方块电阻;当喷雾热解液组成为0.8mol/LSnCl4,0.1mol/LNH4F,0.05mol/LH2O2,异丙醇与水的体积比为8:2,衬底温度为500℃,喷涂100次时,所得FTO薄膜在可见光区的平均透光率为84%,方块电阻为15Ω/□,且FTO薄膜平整致密、二氧化锡晶粒均匀。

EFFECT OF SOLUTION COMPOSITION ON CHARACTERISTICS OF FLUORINE-DOPED TiN DIOXIDE CONDUCTIVE THIN FILMS DEPOSITED BY SPRAY PYROLYSIS

Transparent conductive thin films of F:SnO_2 (FTO) were deposited on preheated microscopic glass slides using SnCl_4·5H_2O and NH_4F as sources for tin and fluorine, isopropanol and water as solvents by an intermittent spray pyrolysis method. The effects of concentration of SnCl_4, NH_4F, H_2O_2 and volume ratio of isopropanol to water on the optical and electrical characteris tics of FTO thin films were investigated. The FTO thin films were characterized by X-ray diffractometer, scanning electron micro scope, ultraviolet-visible spectrometry and four-point-probe setup. The results show that the transmittance of the FTO thin films can be improved due to a moderate concentration of H_2O_2 (~0.05 mol/L) in the spraying solution, and the sheet resistance is unchanged. The sheet resistance and the average transmittance of the FTO thin films prepared with the solution with 0.8 mol/L SnCl_4, 0.1 mol/L NH4F and 0.05 mol/L of H_2O_2, at a volume ratio of isopropanol to water of 8:2 for 100 times at 500 ℃ are 15 Ω/D and 84%, respec tively. The FTO thin film has uniform grain size and a compact morphology.