Effect of gas composition on the deposition of ZrC-C mixtures: The bromide process

Mixtures of ZrC-C were chemically vapour deposited from gaseous mixtures of zirconium bromides, methane, hydrogen and argon. The effect of gas composition on the deposition behaviour was studied. The experiments have shown that the methane concentration in the feed gas mixture is a crucial factor in determining the deposition rate and the character of the deposit. Chemical equilibria in the Zr-C-H-Br system were calculated and compared with the experimental results.