| 脉冲激光沉积技术制备超导铌薄膜及其特性研究 |
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| 引用本文： | 彭明娣,卢维尔,夏洋,王桐,赵丽莉,李楠.脉冲激光沉积技术制备超导铌薄膜及其特性研究[J].材料导报,2018,32(Z1):105-109. |
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| 作者姓名： | 彭明娣 卢维尔 夏洋 王桐 赵丽莉 李楠 |
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| 作者单位： | 中国科学院微电子研究所微电子仪器设备研究中心;北京交通大学理学院;中国科学院微电子研究所微电子器件与集成技术重点实验室;集成电路测试技术北京市重点实验室 |
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| 基金项目： | 国家自然科学基金青年基金(61604175；61404170) |
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| 摘 要： | 采用脉冲激光沉积技术(PLD)在硅衬底上制备超导Nb薄膜,并通过X射线衍射(XRD)、扫描电子显微镜(SEM)、高分辨X射线光电子能谱(XPS)、综合物性测量系统(PPMS)等测试分析手段,分别考察了不同激光能量、靶基间距、衬底温度对Nb薄膜晶体结构、表面形貌和电学性能的影响。结果表明,Nb薄膜在(110)晶向择优生长,并且随着激光能量的增加,薄膜的结晶质量逐渐提高;合适的衬底温度和靶基间距有利于提高Nb薄膜的结晶性能;在激光能量280 mJ、靶基间距5cm、加热盘温度650℃时制备所得Nb薄膜在(110)晶面半峰宽(FWHM)为0.39°,超导转变温度(Tc)为8.6K,且Nb薄膜具有良好的结晶性能和超导特性。
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| 关 键 词： | 脉冲激光沉积 超导Nb金属薄膜 超导转变温度 超导性能 结晶特性 |
Study on Preparation and Properties of Superconducting Niobium Films by Pulsed Laser Deposition |
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| PENG Mingdi,LU Weier,XIA Yang,WANG Tong,ZHAO Lili and LI Nan.Study on Preparation and Properties of Superconducting Niobium Films by Pulsed Laser Deposition[J].Materials Review,2018,32(Z1):105-109. |
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| Authors: | PENG Mingdi LU Weier XIA Yang WANG Tong ZHAO Lili and LI Nan |
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| Affiliation: | Electronic Equipment and Equipment Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029;College of Science, Beijing Jiaotong University, Beijing 100044,Electronic Equipment and Equipment Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029;Key Laboratory of Microelectronic Devices and Integration Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029,Electronic Equipment and Equipment Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029;Beijing Key Laboratory of IC Test Technology, Beijing 100088,Electronic Equipment and Equipment Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029,Electronic Equipment and Equipment Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029 and Electronic Equipment and Equipment Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029 |
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| Abstract: | |
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| Keywords: | pulsed laser deposition superconducting Nb metal thin film superconducting transition temperature superconducting property crystalline property |
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