| FeCrNiMoCu高熵合金涂层的多靶磁控共溅射制备及微结构分析 |
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| 引用本文： | 刘春海,蒲国,颜成杰,张伟,崔学军,金永中.FeCrNiMoCu高熵合金涂层的多靶磁控共溅射制备及微结构分析[J].稀有金属材料与工程,2018,47(5):1578-1582. |
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| 作者姓名： | 刘春海 蒲国 颜成杰 张伟 崔学军 金永中 |
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| 作者单位： | 四川理工学院;材料腐蚀与防护四川省重点实验室;宜宾红星电子有限公司;乐山师范学院 |
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| 摘 要： | 采用多靶磁控共溅射技术的单靶功率可调特点,在304不锈钢基体上,制备出了FeCrNiMoCu高熵合金涂层。通过纳米压入(Nanoindentation)、X射线衍射仪(XRD)、扫描电子显微镜(SEM)、原子力显微镜(AFM)等对不同组分含量的FeCrNiMoCu高熵合金涂层的纳米硬度、微观结构及形貌进行了表征。结果表明:磁控共溅射法制备的FeCrNiMoCu涂层具有简单的fcc结构和高的纳米硬度,表面硬度随铁元素含量上升而增加。
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| 关 键 词： | 磁控共溅射 高熵合金涂层 微结构 纳米硬度 |
| 收稿时间： | 2016/4/19 0:00:00 |
| 修稿时间： | 2016/8/14 0:00:00 |
Preparation and Microstructure of FeCrNiMoCu high-entropy alloy coatings by magnetron co-sputtering |
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| LIU Chunhai,PU Guo,YAN Chengjie,ZHANG Wei,CUI Xuejun and JING Yongzhong.Preparation and Microstructure of FeCrNiMoCu high-entropy alloy coatings by magnetron co-sputtering[J].Rare Metal Materials and Engineering,2018,47(5):1578-1582. |
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| Authors: | LIU Chunhai PU Guo YAN Chengjie ZHANG Wei CUI Xuejun and JING Yongzhong |
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| Affiliation: | Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering,Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering,Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering,,Material Corrosion and Protection Key Laboratory of Sichuan Province,College of Materials Science and Engineering,Sichuan University of Science and Engineering, |
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| Abstract: | The FeCrNiMoCu high-entropy alloy coatings were prepared in 304 stainless steel by five- targets co-sputtering. Nano-indentation hardness, microstructure and morphology of the as-deposited coating were investigated using Nano indentation, X-ray diffraction ( XRD), atom force microscopy(AFM) and scanning electron microscopy ( SEM). The obtained results indicate that the coatings have simple FCC solid solution and high hardness, and coating surface hardness increase with Fe content. |
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| Keywords: | magnetron co-sputtering high-entropy alloy coating microstructure nano-indentation hardness |
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