| 直流基体偏压对Al-Cr-Si-N涂层结构和力学性能的影响 |
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| 引用本文： | 张姣姣,王铁钢,阎兵,刘源,姜素猛,董玉. 直流基体偏压对Al-Cr-Si-N涂层结构和力学性能的影响[J]. 稀有金属材料与工程, 2018, 47(7): 2232-2239 |
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| 作者姓名： | 张姣姣 王铁钢 阎兵 刘源 姜素猛 董玉 |
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| 作者单位： | 天津职业技术师范大学天津市高速切削与精密加工重点实验室;中国科学院金属研究所 |
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| 基金项目： | 国家自然科学No. 51301181；天津市应用基础与前沿技术研究计划重点项目No. 15JCZDJC39700；天津市科技特派员项目No. 16JCTPJC49500；天津市高等学校创新团队培养计划项目No. TD12-5043 |
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| 摘 要： | 采用电弧离子镀技术在不同直流偏压下沉积Al-Cr-Si-N涂层,研究基体偏压对涂层成分、微观结构和性能的影响。结果表明:Al-Cr-Si-N涂层以密排六方结构和面心立方结构的AlN相为主,随着基体负偏压增加,涂层的衍射峰整体向小角度方向偏移:涂层内残余压应力逐渐增加,最大值为-0.77 GPa;涂层硬度和摩擦系数变化不明显。当基体负偏压为-40V时,Al-Cr-Si-N涂层的特征参数H/E和H~3/E~(*2)均达最大值,分别为0.15和0.37GPa,此时涂层具有最佳的耐磨性能,摩擦系数亦最低。
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| 关 键 词： | Al-Cr-Si-N涂层 微观结构 显微硬度 残余应力 摩擦磨损 |
| 收稿时间： | 2017-10-10 |
| 修稿时间： | 2017-11-18 |
Influence of DC bias voltage on Structure and Performance of theAl-Cr-Si-N Coatings Prepared by Arc Ion Plating Techniques |
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| ZHANG Jiaojiao,WANG Tiegang,YAN Bing,LIU Yuan,JIANG Sumeng and DONG Yu. Influence of DC bias voltage on Structure and Performance of theAl-Cr-Si-N Coatings Prepared by Arc Ion Plating Techniques[J]. Rare Metal Materials and Engineering, 2018, 47(7): 2232-2239 |
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| Authors: | ZHANG Jiaojiao WANG Tiegang YAN Bing LIU Yuan JIANG Sumeng DONG Yu |
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| Affiliation: | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin,Surface Engineering of Materials Division,Institute of Metal Research,Chinese Academy of Sciences,Shenyang,Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin |
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| Abstract: | Al-Cr-Si-N coatings were deposited by arc ion plating (AIP) technique at various DC bias voltages. The effects of bias voltage on the microstructure, mechanical and wear properties of the Al-Cr-Si-N coatings were investigated. The results show that the Al-Cr-Si-N coatings is mainly composed of the hexagonal structure and the face-centered cubic structure of AlN phase. with the increase of substrate bias, the diffraction peak of the coating is shifted to the small angle. Compressive stress gradually increased, the maximum value of -0.77GPa; coating hardness and friction coefficient change is not obvious. When the negative bias of the substrate is -40V, the characteristic parameters H/E and H3/E* 2 of Al-Cr-Si-N coating are the maximum, which are 0.1475 and 0.3681GPa, respectively. At the same time, the coating had the best wear resistance and the friction coefficient was the lowest. |
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| Keywords: | Al-Cr-Si-N coating microstructure microhardness residual stress friction and wear |
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