| 电子级特种气体输送系统质量控制 |
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| 引用本文： | 龚小雷,李东升. 电子级特种气体输送系统质量控制[J]. 低温与特气, 2009, 27(3): 18-19. DOI: 10.3969/j.issn.1007-7804.2009.03.004 |
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| 作者姓名： | 龚小雷 李东升 |
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| 作者单位： | 上海正帆超净技术有限公司,上海,201108;上海正帆超净技术有限公司,上海,201108 |
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| 摘 要： | 主要介绍应用在半导体行业电子级特种气体输送系统质量控制的要点及其涉及到的检测仪器的工作原理，结合目前行业内气体输送系统质量控制的方法做概括性介绍。
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| 关 键 词： | 特种气体输送系统 质量控制 检测仪器 |
Quality Management of Electronic Speciality Gas Supply System |
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| GONG Xiao-lei,LI Dong-sheng. Quality Management of Electronic Speciality Gas Supply System[J]. Low Temperature and Specialty Gases, 2009, 27(3): 18-19. DOI: 10.3969/j.issn.1007-7804.2009.03.004 |
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| Authors: | GONG Xiao-lei LI Dong-sheng |
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| Affiliation: | Shanghai GenTech UHP Co.;Ltd.;Shanghai 201108;China |
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| Abstract: | Quality control procedures are key processes of electronic speciality gas supply system prior to turn on,testing equipment plays a very important part of this job,this paper summarized all the testing analyzers which used in ultra high purity gas system to meet quality assurance needs. |
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| Keywords: | speciality gas supply system quality control analyzer |
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