| 阵列式脉象传感器的设计与制作 |
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| 引用本文： | 齐天华,刘继伟,高文秀.阵列式脉象传感器的设计与制作[J].传感器与微系统,2005,24(8):86-88. |
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| 作者姓名： | 齐天华 刘继伟 高文秀 |
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| 作者单位： | 1. 厦门大学,机电工程系,福建,厦门,361005
2. 厦门大学,纳米科技中心,福建,厦门,361005 |
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| 摘 要： | 提出了一种用微机电系统(MEMS)技术应变传感器阵列探头客观细腻地采集人体脉象的新思路。探头采用直接腐蚀出电阻条的技术,具有工艺简单、成本低廉、电阻变化率高、工作可靠等优点。对设计进行了理论计算和优化,并用有限元分析软件ANSYS8.0进行了结构和电耦合场仿真,模拟悬臂梁端点位移对电阻变化的影响。当悬臂梁末端位移变化为50μm时,电阻变化率模拟结果为18.84%,与理论计算值19.67%符合得很好。
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| 关 键 词： | 脉象 压阻效应 微机电系统 ANSYS仿真 |
| 文章编号： | 1000-9787(2005)08-0086-03 |
| 收稿时间： | 03 29 2005 12:00AM |
| 修稿时间： | 2005年3月29日 |
Design and manufacture of array sphygmology sensor |
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| QI Tian-hua,LIU Ji-wei,GAO Wen-xiu.Design and manufacture of array sphygmology sensor[J].Transducer and Microsystem Technology,2005,24(8):86-88. |
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| Authors: | QI Tian-hua LIU Ji-wei GAO Wen-xiu |
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| Abstract: | For acquiring more comprehensive information of pulse conditions,a probe of pulse symbol instrument designed by MEMS technology has been presented,the method of direct etching of silicon is utilized to form the resistor.The process is simple,economical,and it has high change rate of resistor,working reliability.After theory calculation,the coupled-field analyses between the structural and electric fields are carried out by finite element analysis software ANSYS 8.0.It simulates the change of resistor with the displacement of cantilever tip.When the tip of cantilever displaces 50μm,the modulation result is 18.84%,and is in good agreement with the calculation result of 19.67%. |
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| Keywords: | sphygmology piezoresistive effect microelectromechanical system(MEMS) ANSYS simulation |
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