硬质合金基体上金刚石膜的XRD研究

近年来CVD金刚石涂层硬质合金刀片的制备与工业化应用已取得进展，对金刚石薄膜的沉积质量、应力状态、粘附性能进行无损表征具有显著的实用价值。本文主要借助XRD分析方法对硬质合金刀片上沉积的金刚石薄膜的微观结构参量、残余应力状态、粘附性能之间的相互关系进行了初步研究，探讨了CVD金刚石膜中残余应力的形成及其对金刚石膜粘附性能的影响。

STUDY ON DIAMOND FILMS DEPOSITED ONTO CEMENTED CARBIDE INSERTS USING X-RAY DIFFRACTION METHOD

The microstructures and residual stresses of diamond films chemically vapor deposited onto cobalt cemented carbide inserts using direct current plasma jet CVD method have been investigated by means of X-ray diffraction. The formation of residual stress and its influence on the adhesion of diamond film deposited were discussed. Research results have shown that there usually are residual compressive stresses with GPa orders of magnitude within diamond films deposited, and residual stresses within diamond films are correlated with the microstructure and purity of diamond films, and suitable residual compressive stress is beneficial to obtain high adhesion of diamond film.