| 1.55μm非晶硅热光F-P腔可调谐滤波器 |
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| 引用本文： | 左玉华,蔡晓,毛容伟,黄昌俊,成步文,李传波,罗丽萍,高俊华,白云霞,姜磊,马朝华,王良臣,余金中,王启明.1.55μm非晶硅热光F-P腔可调谐滤波器[J].半导体学报,2003,24(9). |
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| 作者姓名： | 左玉华 蔡晓 毛容伟 黄昌俊 成步文 李传波 罗丽萍 高俊华 白云霞 姜磊 马朝华 王良臣 余金中 王启明 |
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| 作者单位： | 1. 中国科学院半导体研究所,集成光电子国家重点实验室,北京,100083
2. 中国科学院半导体研究所,光电子工艺中心,北京,100083 |
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| 基金项目： | 国家重点基础研究发展计划(973计划)，国家自然科学基金，国家高技术研究发展计划(863计划) |
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| 摘 要： | 介绍了一种Si基热光Fabry-Perot (F-P)腔可调谐滤波器.F-P腔由电子束蒸发的非晶硅构成.利用非晶硅的热光效应,通过对Si腔加热,改变F-P腔的折射率,从而引起透射峰位的红移.该原型器件调谐范围为12nm,透射峰的FWHM(峰值半高宽)为9nm,加热效率约为0.1K/mW.精确控制DBR(分布式Bragg反射镜)生长获得高反射率镜面是减小带宽的有效途径;通过改进加热器所处位置及增强散热能力,有望进一步提高加热效率.
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| 关 键 词： | 热光效应 Fabry-Perot 可调谐滤波器 非晶硅 |
1.55μm Fabry-Perot Thermo-Optical Tunable Filter with Amorphous-Si as Cavity |
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| Zuo Yuhua,Cai Xiao,Mao Rongwei,Huang Changjun,Cheng Buwen,Li Chuanbo,Luo Liping,Gao Junhua,Bai Yunxia,Jiang Lei,Ma Chaohua,Wang Liangchen,Yu Jinzhong,Wang Qiming.1.55μm Fabry-Perot Thermo-Optical Tunable Filter with Amorphous-Si as Cavity[J].Chinese Journal of Semiconductors,2003,24(9). |
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| Authors: | Zuo Yuhua Cai Xiao Mao Rongwei Huang Changjun Cheng Buwen Li Chuanbo Luo Liping Gao Junhua Bai Yunxia Jiang Lei Ma Chaohua Wang Liangchen Yu Jinzhong Wang Qiming |
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| Abstract: | A 1.55μm Fabry-Perot (F-P) thermo-optical tunable filter is fabricated.The cavity is made of amorphous silicon (a-Si) layer grown by electron-beam evaporation technique.Due to the excellent thermo-optical property of a-Si,the refractive index of the F-P cavity will be changed by heating;the transmittance resonant peak will therefore shift substantially.The measured tuning rang is 12nm, FWHM (full-width-at-half-maximum) of the transmission peak is 9nm,and heating efficiency is 0.1K/mW.The large FWHM is mainly due to the non-ideal coating deposition and mirror undulation.Possible improvements to increase the efficiency of heating are suggested. |
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| Keywords: | thermo-optical effect Fabry-Perot tunable filter a-Si |
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