| 具有90nm调谐范围的1.3μm Si基MOEMS可调谐光滤波器 |
| |
| 引用本文： | 左玉华,黄昌俊,成步文,蔡晓,毛容伟,李传波,罗丽萍,高俊华,白云霞,姜磊,马朝华,朱家廉,王良臣,余金中,王启明. 具有90nm调谐范围的1.3μm Si基MOEMS可调谐光滤波器[J]. 半导体学报, 2003, 24(11) |
| |
| 作者姓名： | 左玉华 黄昌俊 成步文 蔡晓 毛容伟 李传波 罗丽萍 高俊华 白云霞 姜磊 马朝华 朱家廉 王良臣 余金中 王启明 |
| |
| 作者单位： | 中国科学院半导体研究所,集成光电子学国家重点实验室,北京,100083 |
| |
| 基金项目： | 国家重点基础研究发展计划(973计划)，国家自然科学基金，国家高技术研究发展计划(863计划) |
| |
| 摘 要： | 利用表面微机械技术,成功制作了1.3μm Si基MOEMS可调谐光滤波器.原型器件在50V的调谐电压下,调谐范围为90nm.该技术可以用于制作1.3μm Si基可调谐光探测器.
|
| 关 键 词： | MOEMS 可调谐滤波器 Fabry-Perot 表面微机械技术 |
1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm |
| |
| Zuo Yuhua,Huang Changjun,Cheng Buwen,Cai Xiao,Mao Rongwei,Li Chuanbo,Luo Liping,Gao Junhua,Bai Yunxia,Jiang Lei,Ma Chaohua,Zhu Jialian,Wang Liangchen,Yu Jinzhong,Wang Qiming. 1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm[J]. Chinese Journal of Semiconductors, 2003, 24(11) |
| |
| Authors: | Zuo Yuhua Huang Changjun Cheng Buwen Cai Xiao Mao Rongwei Li Chuanbo Luo Liping Gao Junhua Bai Yunxia Jiang Lei Ma Chaohua Zhu Jialian Wang Liangchen Yu Jinzhong Wang Qiming |
| |
| Abstract: | Optical filters capable of single control parameter-based wide tuning are implemented and studied.A prototype surface micromachined 1.3μm Si-based MOEMS (micro-opto-electro-mechanical-systems) tunable filter exhibits a continuous and large tuning range of 90nm at 50V tuning voltage.The filter can be integrated with Si-based photodetector in a low-cost component for coarse wavelength division multiplexing systems operating in the 1.3μm band. |
| |
| Keywords: | MOEMS Fabry-Perot tunable filter surface micromaching |
| 本文献已被 万方数据 等数据库收录！ |
|
