Correction of a Piezoresistive Pressure Sensor Using a Microcontroller

A smart piezoresistive pressure sensor using a microcontroller is described. The microcontroller ensures temperature compensation and linearization of the sensor, as well as the data exchange. To compensate for the sensor's imperfection, approximation of the sensor inverse response function by a second-order polynomial in terms of pressure and temperature is used. The maximum measurement error with respect to the full measurement range lies within ±0.1% compared to the ideal sensor response function within the temperature range of 0–70°C.