微制造平台微振动的最优控制

采用混合隔振技术建立了微制造平台隔振系统。该系统以空气弹簧和橡胶层作为被动隔振元件、超磁致伸缩致动器作为主动隔振元件，并采用最优控制理论设计其主动控制器。研究了在不同的性能指标加权阵的情况下，该主动振动控制系统对基础干扰和由微制造设备产生的直接干扰所引起的微制造平台振动的控制效果。研究表明性能指标加权阵对振动控制效果影响非常大。通过大量的仿真实验确定了一组性能指标加权阵，使所设计的主动控制系统能在较宽的频率范围对基础干扰和直接干扰所引起的微制造平台振动进行有效的控制。

Optimal Control for Microvibration of a Micro-Manufacturing Platform

A hybrid vibration isolation system of micro-manufacturing platform is developed. This system uses air springs and rubber layer as passive vibration isolation elements and giant magnetostrtctive actuators as active vibration isolation elements. The active vibration control system is designed according to the optimal control theory, and its isolation performance against the floor disturbance and the direct disturbance produced by the micro- manufacturing equipments is researched. A set of weight matrices of the cost function is obtained by large number of simulations. The result shows that the developed active vibration control system has good isolation performance against the floor disturbance and the direct disturbance over wide frequency range.