| Scanning Measurement Method of Dispersion Mini-spot by Quadrant Photodetector |
| |
| 作者姓名： | DANG Li-ping LIU Jun-hua TANG Shu-gang |
| |
| 作者单位： | 1. School of Electric Engineering，Xi'an Jiaotong University，Xi'an 710049，CHN; 2. Xi'an Institute of Surveying and Mapping，Xi'an 710063，CHN |
| |
| 基金项目： | 中国科学院资助项目，National Defense Technology Rebuilding Research Foundation of China |
| |
| 摘 要： | Quadrant photodetector is a new type position detector, which has already been applied to many fields such as measurement, target tracking, control, laser collimation, guidance, etc. System performance is related to laser spot area received by the quadrant photodetector. The optimum linear output signal of system is gotten only when the size of laser dispersion spot is well-proportioned to the detector photosensitive area. A method to measure the mini-spot received by detector and to adjust it in real time is presented, which is based on the quadrant geometrical and optical structure, making use of tilting mirror scanning, the sequence output signal of detector is gotten, then measurement model is built with rate of signal change as characteristic variable, the radius of the laser dispersion spot and adjustable value of dispersion are calculated. The experiment result shows that the maximum error is 0.58μm in measurement range of 0.5mm±0.1mm.
|
| 关 键 词： | 扫描测量 色散 光电检测器 位置探测器 |
| 文章编号： | 1007-0206（2006）01-0061-06 |
| 收稿时间： | 2005-08-25 |
| 修稿时间： | 2005-10-07 |
Scanning Measurement Method of Dispersion Mini-spot by Quadrant Photodetector |
| |
| DANG Li-ping,LIU Jun-hua,TANG Shu-gang.Scanning Measurement Method of Dispersion Mini-spot by Quadrant Photodetector[J].Semiconductor Photonics and Technology,2006,12(1):61-66. |
| |
| Authors: | DANG Li-ping LIU Jun-hua TANG Shu-gang |
| |
| Abstract: | Quadrant photodetector is a new type position detector, which has already been applied to many fields such as measurement, target tracking, control, laser collimation, guidance, etc. System performance is related to laser spot area received by the quadrant photodetector. The optimum linear output signal of system is gotten only when the size of laser dispersion spot is well-proportioned to the detector photosensitive area. A method to measure the mini-spot received by detector and to adjust it in real time is presented, which is based on the quadrant geometrical and optical structure, making use of tilting mirror scanning, the sequence output signal of detector is gotten, then measurement model is built with rate of signal change as characteristic variable, the radius of the laser dispersion spot and adjustable value of dispersion are calculated. The experiment result shows that the maximum error is 0.58μm in measurement range of 0.5mm±0.1mm. |
| |
| Keywords: | Quadrant photodetector Dispersion spot Defocusing amount |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
