| 大幅面超精密图形发生器X－Y工作台位置补偿校正 |
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| 引用本文： | 屈胜利,朱欣志,陈怀琛.大幅面超精密图形发生器X－Y工作台位置补偿校正[J].西安电子科技大学学报,1996(3). |
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| 作者姓名： | 屈胜利 朱欣志 陈怀琛 |
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| 作者单位： | 西安电子科技大学电子工程学院 |
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| 摘 要： | 在超精密控制中，一般采用双频激光多卜勒测量系统作为位置测量元件．因存在机架、材料膨胀及材料、激光死区和环境空气变化，控制软件必须对此进行补偿校正．文中分析并推导出了有关的Ｘ－Ｙ工作台位置补偿校正公式，并给出了进行实际应用的例子．
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| 关 键 词： | 激光测量 X－Y工作台 位置补偿校正 死区 光绘机 图形发生器 |
Compensation and correction of the X Y stage position for the large scale ultra precision artwork generator |
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| Qu Shengli,Zhu Xinzhi,Chen Huaichen.Compensation and correction of the X Y stage position for the large scale ultra precision artwork generator[J].Journal of Xidian University,1996(3). |
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| Authors: | Qu Shengli Zhu Xinzhi Chen Huaichen |
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| Abstract: | Dual frequency laser Doppler measurement systems are generally used as position measurement components in ultra precision control. The control software ought to posses the capability of compensiation and correction for the expansion of structure and materials, for the Deadband of materials and laser, and for the change of environment air. This paper analyses and obtains the formulas of X Y stage position compensation and correction. The formulas have been used in practice with good results. |
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| Keywords: | laser measurement X Y stage position compensation and correction Deadband photoplotter artwork generator |
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