| 钛酸锶薄膜的制备与应用研究进展 |
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| 引用本文： | 常亮亮,殷明志,杨亮亮.钛酸锶薄膜的制备与应用研究进展[J].材料开发与应用,2011,26(1):51-55. |
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| 作者姓名： | 常亮亮 殷明志 杨亮亮 |
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| 作者单位： | 西北工业大学理学院; |
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| 基金项目： | 航天支撑基金,编号:2009613305 |
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| 摘 要： | 介绍了钛酸锶(STO)薄膜的五种制备方法(等离子体增强化学气相淀积、射频磁控溅射、金属有机化学气相沉积、脉冲激光沉积、溶胶-凝胶)及STO薄膜在电容-电压敏双功能材料、CMOS器件、氧敏材料、PZT铁电薄膜电极材料等方面的应用的研究进展.提出了需进一步开展的研究课题如:晶粒晶界控制、界面控制、漏电导机制、疲劳机制、非线...
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| 关 键 词： | 钛酸锶 制备技术 |
The Progress of Research on the Film of Strontium Titanate: Preparations and Applications |
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| CHANG Liang-liang,YIN Ming-zhi,YANG Liang-liang.The Progress of Research on the Film of Strontium Titanate: Preparations and Applications[J].Development and Application of Materials,2011,26(1):51-55. |
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| Authors: | CHANG Liang-liang YIN Ming-zhi YANG Liang-liang |
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| Affiliation: | CHANG Liang-liang,YIN Ming-zhi,YANG Liang-liang(Science School,Northwest polytechnique University,Xi'an 710072,China) |
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| Abstract: | The progress of the research on the film of strontium titanate(ST) is reviewed.Included are the five preparation methods Such as PECVD,radio frequency magnetron sputtering,MOCVD,PLD,and sol-gel.The application as capacitance-voltage sensitive dual-functional materials,CMOS devices,thermal components,hydrogen gas sensor and PZT ferroelectric thin film electrodes are introduced.The subjects needing further research such as control of crystal grain boundary,control of interface,leakage conductance mechanism,fa... |
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| Keywords: | Strontium titanate Preparation technology Applications |
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